The aberration corrected SEM

Abstract

The performance of the conventional low-energy CD-SEM is limited by the aberrations inherent in the probe forming lens. Multi-pole correctors are now available which can reduce or eliminate these aberrations. An SEM equipped with such a corrector offers higher spatial resolution and more probe current from a given electron source, and other aspects of the optical performance are also improved, but the much higher numerical aperture associated with an aberration corrected lens results in a reduction in imaging depth of field. © 2005 American Institute of Physics.