Design of a micro-optical low coherent interferometer array for the characterisation of MEMS and MOEMS

Gastinger, K., Haugholt, K. H., Røyset, A., Albero, J., Zeitner, U., & Gorecki, C. (2009). Design of a micro-optical low coherent interferometer array for the characterisation of MEMS and MOEMS. In Fringe 2009 - 6th International Workshop on Advanced Optical Metrology (pp. 611–617). Springer Science and Business Media Deutschland GmbH. https://doi.org/10.1007/978-3-642-03051-2_104