Modeling and simulation of capacitive MEMSComb accelerometer for sensitivity improvement with different proof mass patterns

Abstract

This Paper presents the sensitivity of a design for three dimensional comb type beam structure based accelerometer. Initially the basic comb accelerometer is developed and displacement sensitivity is observed by modeling and simulation. It is observed that accelerometer sensitivity is improved through the optimum selection of parameters via number of fingers, beam length, beam width, mass width,, spring constant. The movable proof mass is connected to two anchors. The movable fingers are connected to the two sides of the proof mass. Every movable finger consists of two fixed fingers are connected to the left and right respectively. Any acceleration along the direction on movable mass, it will induce the inertial force and deflect the beam. Hence the capacitance will performed in between fixed and movable fingers. By changing the parameters like fingers width, number of fingers, proof mass shape, and spring constant the displacement is changed. By adjusting these parameters corresponding sensitivity can be improved.