Real-time monitoring system for industrial motion and optical micro vibration detection

Abstract

Sensitive processes in semiconductor manufacturing require the isolation and quick absorption of vibration. In this study, a monitoring system for driving motion and detecting vibration was developed for active vibration isolation and absorption. The monitoring system was an expandable embedded system with functions of motor control, signal conversion, data communication, on-board memory, and IO interfaces. The vibration in this system was at the micro level, so laser gap sensors were used, and a connection was made with a monitoring system using TCP/IP to minimize noise in the data transfer line. A motion and vibration profile was acquired with the developed system. © 2014 Springer International Publishing.