Reactions of He+, Ne+, and Ar+ with CH4, C2H6, SiH4, and Si 2H6

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Abstract

The rate coefficients and product-ion distributions for the reactions of He+ and Ar+ with silane and disilane have been measured in a drift tube, typically for collision energies of 0.01-1 eV. The total charge-exchange rate coefficients are found to be roughly independent of E/N, or collision energy, and are about equal to the Langevin values for the reactions of He+ with SiH4 and C2H6 and Ar+ with CH4 and C2H6. The He + rate coefficients on CH4 and Si2H 6, and the Ne+ rate coefficients on SiH4 and Si2H6 are 50% to 80% of the Langevin values, while the Ar+ rate coefficients on SiH4 and Si2H 6 are much smaller. Product ions tend to be hydrogen poor with very infrequent breaking of the C-C or Si-Si bonds. Furthermore, hydrogen stripping is more severe for the silanes than the alkanes. These product-ion distributions bear no resemblance to the product-ion distributions of either photoionization or electron collisional ionization. © 1983 American Institute of Physics.

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APA

Chatham, H., Hils, D., Robertson, R., & Gallagher, A. C. (1983). Reactions of He+, Ne+, and Ar+ with CH4, C2H6, SiH4, and Si 2H6. The Journal of Chemical Physics, 79(3), 1301–1311. https://doi.org/10.1063/1.445884

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