The incorporation mechanisms of residual impurities in GaAs layers grown by molecular-beam epitaxy has been investigated by high-resolution photoluminescence (PL) spectroscopy at 2 K. A systematic study of near-band-edge emissions of undoped GaAs layers grown at a wide range of growth temperatures (Tg), 470-750 °C, demonstrates that PL spectra related with residual impurities are significantly dependent upon Tg. It was found that maximum emission intensity of free exciton is obtained at Tg ∼550 °C, and the minimum impurity incorporation is established at T g of 550-650 °C.
CITATION STYLE
Kudo, K., Makita, Y., Takayasu, I., Nomura, T., Kobayashi, T., Izumi, T., & Matsumori, T. (1986). Photoluminescence spectra of undoped GaAs grown by molecular-beam epitaxy at very high and low substrate temperatures. Journal of Applied Physics, 59(3), 888–891. https://doi.org/10.1063/1.336559
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