Combining scanning probe microscopy and transmission electron microscopy

Abstract

This chapter is a review of an in situ method where a scanning probe microscope (SPM) has been combined with a transmission electron microscope (TEM). By inserting a miniaturized SPM inside a TEM, a large set of open problems can be addressed and, perhaps more importantly, one may start to think about experiments in a new kind of laboratory, an in situ TEM probing laboratory, where the TEM is transformed from a microscope for still images to a real-time local probing tool. In this method, called TEMSPM, the TEM is used for imaging and analysis of a sample and SPM tip, while the SPM is used for probing of electrical and mechanical properties or for local manipulation of the sample. This chapter covers both instrumental and applicational aspects of TEMSPM.