Surface Chemical Analysis

Abstract

The physical bases of surface chemical analysis surface chemical analysis techniques are described in the context of semiconductor semiconductoranalysis analysis. Particular emphasis is placed on the SIMSsecondaryion mass spectrometry (SIMS)semiconductorcharacterization (secondary ion mass spectrometry) technique, as this is one of the more useful tools for routine semiconductor characterization. The practical application of these methods is addressed in preference to describing the frontiers of current research.