The material nonlinearity is one of the many nonlinear factors in MEMS(Micro Electro Mechanical System). The microbeam is a basic component in MEMS. In this paper, the influence of nonlinear elasticity factor has been considered in dynamic analysis of the microbeam. A nonlinear modal is set up that as a clamped-clamped microbeam subjected to a transverse electrostatic force. The nonlinear governing equation is transformed into a linear differential equation system through the use of Linstedt-Poincaré perturbation method, which are then solved by using the Galerkin method. Numerical results show that, the nonlinear factor can't be ignored when the number of the nonlinear material constant, B is big. The amplitude and the period of the microbeam will increase when the number of B is increasing. © 2012 Springer-Verlag GmbH.
CITATION STYLE
Yang, L., Peng, J. S., Xie, G., & Luo, G. B. (2012). Dynamic analysis of nonlinear elasticity microbeam with electromechanical couping. In Advances in Intelligent and Soft Computing (Vol. 145 AISC, pp. 417–423). https://doi.org/10.1007/978-3-642-28308-6_57
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