The Positioning Accuracy Measurement of the Dispenser and Compensation Method

Abstract

This article describes a method for measuring the positioning accuracy of dispenser and the compensation method. This method uses customized high-precision calibration boards, CCD imaging technology and vision algorithms to measure the XY two-dimensional positioning accuracy of the machine, and compensate the measured error results to the motion system to improve the positioning accuracy of the machine. Since the deviation is calculated by visually grabbing the Mark points on the calibration board, it is lower in cost, easier to operate, and more efficient than the traditional laser interferometer measurement method. Furthermore, the traditional laser interferometer can only perform single-axis compensation, while the calibration plate method can compensate XY at the same time, which truly improves the positioning accuracy.