Microsystems for the effective technological processes

Abstract

Piezoelectric composite material whose basic element is PZT is developed. It allows controlling the optical parameters of the diffraction grating, which is imprinted in it. In addition, the sensitivity of the designed element is increased using silver nanoparticles, thus surface plasmon resonance effect appears. The developed technological route of the production of complex 3D microstructure, from designing it by the method of computer generated holography till its physical 3D patterning by exploiting the process of electron beam lithography and thermal replication, is presented. The experimental technology for the better quality of complex microstructure replicas based on high frequency excitation in the mechanical hot imprint process was proposed and implemented.