Design of a precision flexural linear stage system with sub-nanometer resolution and 12-mm travel range

Abstract

Precision ball-bearing-based or roller-bearing-based positioning stage systems are capable of providing a large travel range. However, it is not possible to meet requirements in sub-nanometer positioning resolution, high tilting stiffness, and microradian-level straightness of trajectory repeatability with a simple rolling element guiding system. To meet those requirements and still allow for large travel range, we have designed a novel precision flexural linear stage. It is capable of sub-nanometer positioning resolution and 12-mm travel range for synchrotron radiation instrumentation applications. The design and preliminary test results for a prototype stage system are discussed in this paper.