Cross-coupling effect severely hinder fast and accurate tracking for parallel piezo nanopositioning stages. In this paper, a data-driven feedforward decoupling filter (DDFDF) is proposed to reduce the cross-coupling caused errors. Traditional control methods for coupled system could achieve good performance on the premise that the dynamic model is accurate and no non-minimum phase zeros exist. The proposed method is totally data-driven with the advantage of no need for accurate identified model and model structure by Gauss-Newton gradient-based algorithm. The DDFDF for eliminating cross-coupling errors was verified on a 2-DOF coupled nanopositioning stage through simulations. Results show the effectiveness of the proposed controller by comparing with open-loop simulations and the well-designed feedback controller.
CITATION STYLE
Feng, Z., Ling, J., Ming, M., & Xiao, X. (2016). Data-driven feedforward decoupling filter design for parallel Nanopositioning stages. In Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics) (Vol. 9834 LNCS, pp. 709–720). Springer Verlag. https://doi.org/10.1007/978-3-319-43506-0_61
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