Experimental Characterization Techniques for Micro/Nanoscale Devices

Abstract

This chapter introduces some commonly utilized techniques for the dynamic measurement and characterization of microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) devices. One important step in the design process is verifying that the devices perform as expected. In many MEMS applications, this involves quantifying the motion. In this chapter, a variety of techniques for characterizing MEMS and NEMS devices are presented. The techniques discussed here cover both dynamic and static/quasi-static characterization, as well as the extraction of model parameters. Techniques for external actuation and motion measurement are covered in depth. An example demonstrating methods for extracting linear and nonlinear device parameters from a micro-resonator is given. Error analysis techniques are also demonstrated. From this introduction, a user should be able to choose a suitable test technique for a variety of MEMS/NEMS devices.