Transparent and conductive nickel oxide (NiO) thin films were deposited on the glass supports by magnetron pulverization (RF). The NiO thin films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), SEM equipped with X-ray detector-analyzer (EDX), UV-VIS spectroscopy and Hall measurements. XRD revealed that the NiO thin films obtained at different substrate temperatures are textured and possess a cubic crystalline structure. SEM analysis indicates the formation of the crystallites with a granular structure. The EDX spectra of the NiO thin films highlighted the presence of Ni and O as elementary components. With the increase of the substrate temperature from 50 to 450 °C Hall measurements show a decrease of the resistivity of the NiO thin layers due to the increase of the concentration and mobility of the free carriers.
CITATION STYLE
Ghimpu, L., Suman, V., & Rusnac, D. (2020). Influence of the growth temperature on the properties of the transparent and conductive NiO thin films obtained by RF magnetron sputtering. In IFMBE Proceedings (Vol. 77, pp. 291–295). Springer. https://doi.org/10.1007/978-3-030-31866-6_57
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