Review on micromachining techniques

Abstract

Micromachining is related to specific techniques applied to micro and meso scale elements, in order to produce components with high precision and very restrictive dimensional and geometrical tolerances (micron or sub-micron). In the industrial world the interest in microscopic scale manufacturing is exponentially increasing in relation to the rapid growth of Micro Electro Mechanical Systems (MEMS) research. Thus a greater attention is given to improve traditional techniques and developing non-conventional machining methods, in order to obtain more precision. This paper intends to present a review of the actual state of art in micromachining, showing possible different ways to create high aspect ratio patterns or 3D sculptured workpieces. Therefore the most important techniques will be presented, focusing on photolithography (bulk & surface machining), LIGA, laser, micro-EDM, micro-USM and microme-chanical machining (microcutting and micromilling). Machinable materials, obtainable working tolerances, limits and problems will be also highlighted for every method.