Abstract
The nano-stage driven by magnetostrictive actuator is composed of a magnetostrictive actuator and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the magnetostrictive actuator and the friction behavior in the PM, the accurate position control of the nano-stage is a challenging task. This paper discusses the high precision control for the magnetostrictive nano-stage, where the hysteresis is described by Preisach model. The proposed control law ensures the zero output tracking of the controlled stage. Experimental results show the effectiveness of the proposed method. © 2013 Springer-Verlag Berlin Heidelberg.
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CITATION STYLE
Chen, X., & Su, C. Y. (2013). High precision control for nano-stage driven by magnetostrictive actuator. In Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics) (Vol. 8103 LNAI, pp. 666–677). Springer Verlag. https://doi.org/10.1007/978-3-642-40849-6_66
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