Fabrication of microlens arrays with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes

Abstract

The microlens array (MLA) or micromirror array (MMA) is one of the most important units in many optical devices and photoelectronic systems. The paper presents a process for fabricating an MLA with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes. The approach has been shown capable of generating large-area and high-quality MLAs or MMAs economically. Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.