CITATION STYLE
Xu, W., Lu, X., Pan, G., Luo, J., & Zhang, C. (2009). Experimental Study of Ultrasonic Vibration Assisted Chemical Mechanical Polishing for Sapphire Substrate. In Advanced Tribology (pp. 464–466). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-642-03653-8_144
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