Humidity-Sensitive Materials

Abstract

Humidity measurement and control is vital to many manufacturing processes such as textiles production, food processing, paper making, semiconductor manufacture, the petrochemical industries, and many others. The present chapter describes the principles of humidity sensor operation and analyzes the materials acceptable for application in these devices. Experiment has shown that polymers and metal oxides are the most promising materials for this purpose. Porous semiconductors such as porous silicon and other materials such as CNTs, LiCl, etc., can also be used. The advantages and disadvantages of these materials are given. The chapter includes 9 figures, 2 tables, and 152 references.