Abstract
Devices can be made with decreasing linear dimensions until one of two limitations is reached, namely
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CITATION STYLE
APA
Brodie, I., & Muray, J. J. (1992). Limits to Nanofabrication. In The Physics of Micro/Nano-Fabrication (pp. 583–615). Springer US. https://doi.org/10.1007/978-1-4757-6775-9_7
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