Methods and materials for adsorbing the benzene molecule based on micro electro mechanical system

Abstract

This paper provides a review about the available adsorbent materials, the most suitable adsorbent material for coating the porous silicon for adsorbing the benzene molecule and the selection of silicon wafer type, resistivity, orientation, and thickness. Then, the basic requirements for performing electrochemical etching process (ECE) to fabricate the porous silicon and spin coating process for coating the thin layer of benzene adsorbent material on the porous silicon will be analyzed. Mathematical formulas used for estimating the adsorption amount, porosity, and pore size will be discussed.