Semiconductor Manufacturing Automation

Abstract

We review automation requirements and technologies for semiconductor manufacturing. We first discuss equipment integration architectures and control to meet automation requirements for modern fabs. We explain tool architectures and operational issues for modern integrated tools such as cluster tools, which combine several processing modules with wafer-handling robots. We then review recent progress in tool science for scheduling and control of integrated tools and discuss control software architecture, design, and development for integrated tools. Next, we discuss requirements and technologies in fab integration architectures and operation such as modern fab architectures and automated material-handling systems, communication architecture and networking, fab control application integration, and fab control and management.