Broadband extreme ultraviolet interferometry and imaging

Abstract

Using a pair of phase-locked high-harmonic generation sources, we demonstrate Fourier transform interferometry at extreme-ultraviolet (EUV) wavelengths between 17 and 55 nm. This is made possible by the adaptation of a birefringence-based ultrastable interferometer for infrared femtosecond pulses. Since we measure the interference with an EUV-sensitive CCD camera, this enables a wide range of spatially and spectrally resolved measurements at extreme ultraviolet wavelengths. We demonstrate the capabilities of this technique by performing wavelength-resolved high-resolution coherent diffractive imaging and by measuring the spatially resolved spectral absorption of a thin structured titanium film.