Elemental Analysis by Electron Microscopes

  • Tanaka N
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Abstract

Typical methods for elementalElemental analysis and physical analysesPhysical analyses are electron probe microanalysis (EPMA)Electron probe microanalysis (EPMA) and Auger electron spectroscopy(AES)Auger electron spectroscopy(AES) .

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Tanaka, N. (2017). Elemental Analysis by Electron Microscopes. In Electron Nano-Imaging (pp. 265–266). Springer Japan. https://doi.org/10.1007/978-4-431-56502-4_22

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