Temperature Effect of Chemical Bath Deposition (CBD) to Fabrication and Characterization of Zinc Oxide Nanorods Thin Films Based Gas Sensing: Ethanol

Abstract

Fabrication of zinc oxide (ZnO) nanorods thin films based gas sensing ethanol have been done. Ethanol belongs to volatile organic compound (VOC) that are dangerous if inhaled by humans in high concentrations, so that its detection is necessary. Temperature as kinetic controller of chemical bath deposition (CBD) process take effect to ZnO fabrication and characterization. ZnO nanorods thin films was synthesized onto glass substrate by dip-coating technique. ZnO nanorods was grown using Zn(NO3)2.4H2O and HMTA with ratio 1:1 under CBD condition at temperature 75°C, 83°C, and 87°C. Result of SEM showing ZnO CBD 83°C has nanorods shape with diameter size is 95.56 nm, furthermore at 75°C the formation of the nanorods was not completed yet while at nanorods became deconstructed. XRD result showed all of ZnO sample have hexagonal wurzite which are match well with ICDS-094004 card. Ethanol gas sensing tested at 100°C, 150°C, 200°C showed high sensitivity of the sensor up to 77.31% for ZnO CBD 75°C at 100°C. ZnO CDB 83°C sample at test 200°C have highest response on 2.22 min (tres) and 0.45 min (trec). Time respond and recovery will increase along with increasing of test temperature.