The purpose of this study is to design a tracking controller for micro-piezoelectric motion platform applications. The hysteresis effect is originated from the piezoelectric actuated platform that provides nonlinear behaviors. A Prandtl-Ishlinskii model is constructed to describe the hysteresis behavior of piezoelectric actuators. The weights of hysteresis model are identified by using the LMS(Least-Mean-Square) algorithm. Based on the Prandtl-Ishlinskii model, a feed-forward controller is developed for compensating the hysteresis nonlinearity. A self-tuning neuro-PID controller is introduced to suppress the tracking errors due to the modeling inaccuracy and hence to get precision tracking errors. These approaches are numerically and experimentally verified which demonstrate the performance and applicability of the proposed designs under a variety of operating conditions. © 2009 Springer Berlin Heidelberg.
CITATION STYLE
Liu, V. T., Chen, M. J., & Yang, W. C. (2009). Modeling of micro-piezoelectric motion platform for compensation and neuro-PID controller design. In Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics) (Vol. 5754 LNCS, pp. 784–793). https://doi.org/10.1007/978-3-642-04070-2_84
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