Micro-scale geometry measurement

Abstract

The ability to produce complex, high-precision, miniature components is key to the transition to high-value manufacturing. The advanced manufacturing industries, using precision machining techniques, such as diamond turning, injection moulding, micro-milling and micro-electro-discharge machining, currently have a number of capabilities for measuring small-scale structures with micro-scale tolerances, either with tactile or non-tactile systems. Metrology is essential for the reduction of dimensional tolerances, which allows the production of more efficient machines and the improvement of their longevity by reducing play or wear. In this chapter, contact and non-contact techniques that can be used to measure 3D features on the micro-metre scale are reviewed.