An Electromagnetic Microvalve for Pneumatic Control of Microfluidic Systems

Abstract

An electromagnetic microvalve for pneumatic control of microfluidic devices has been designed, fabricated, and tested. The microvalve is composed of two parts: a miniature electromagnetic actuator and a valve body. The electromagnetic actuator consists mainly of a thin polydimethylsiloxane (PDMS)–based elastomer, which acts as the valve diaphragm. The diaphragm, used as a solid hydraulic medium, converts the large contact area of a valve core into a small contact area of valve head while maintaining a large stroking force. This microvalve remains closed because of a compressed mechanical spring force generated by the actuator. On the other hand, when a voltage is applied, the valve core moves up, relaxing the thin PDMS membrane, opening the microvalve. The fast open response (~17 ms) of the valve was achieved with a leak rate as low as 0.026 sccm at 200 KPa (N2) pressure. We tested the pertinent dynamic parameters such as flow rate in on/off mode, flow rate of duty cycles, and actuated frequencies in pulse width modulation (PWM) mode. Our method provides a simple, cheap, and small microvalve that avoids the bulky and expensive external pressure control solenoid manifold. This allows it to be easily integrated into portable and disposable devices.