Development of multi-scale deformation measurement system for solid materials

Abstract

The purpose of this study is to perform Digital Image Correlation (DIC) by using images obtained from Scanning Electron Microscopes (SEM). Firstly, some pictures of SEM at magnifications of 200X and 5000X are taken without moving the specimen, and DIC is performed using by these pictures. From the results, we can see that the errors of small random displacement occur at whole correlation area for 200X and 5000X images, and drift of specimen occurs for 5000X images. However, the errors of small random displacement can be removed by performing the original image processing. About drift, we measure the amount of drift. As a result, it is seen that the amount of drift increases monotonously. Therefore, we try to predict the amount of drift by the proposed original method. Then, the drift can be eliminated from the results of DIC using SEM image. ©2010 Society for Experimental Mechanics Inc.