Skip to main content
Book Chapter

Novel MEMS Fluidic Integrated Circuit Technology with ‘MOSFET-Like Microvalve Elements’

  • Takao H
  • Ishida M
Springer US, (2007), 444-472
DOI: 10.1007/0-387-25786-1_13
N/ACitations
Citations of this article
6Readers
Mendeley users who have this article in their library.
Get full text

Cite

CITATION STYLE

APA

Takao, H., & Ishida, M. (2007). Novel MEMS Fluidic Integrated Circuit Technology with ‘MOSFET-Like Microvalve Elements.’ In MEMS/NEMS (pp. 444–472). Springer US. https://doi.org/10.1007/0-387-25786-1_13

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free