Abstract
Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromechanical systems (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from 3D SiGe/Si/Cr and Si/Cr nanostructures is presented. Nanosensors and nanoactuators are investigated from experimental, theoretical, and design perspectives. © 2007 IOP Publishing Ltd.
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CITATION STYLE
Dong, L., Zhang, L., Bell, D. J., Grützmacher, D., & Nelson, B. J. (2007). Nanorobotics for creating NEMS from 3D helical nanostructures. Journal of Physics: Conference Series, 61(1), 257–261. https://doi.org/10.1088/1742-6596/61/1/052
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