Laser Devices and Optical Systems for Laser Precision Microfabrication

Abstract

This chapter provides introductory explanation on various laser devices and optical systems for laser precision microfabrication regarding their basic operation principles and examples of performance capability. Emphasis is placed on compact and efficient diode-pumped high-brightness solid-state lasers capable of a variety of lasing operations from continuous wave to ultrafast pulse generation. The following optical systems are discussed: beam shaping optics, beam scanning optics, spatial light modulators, optical frequency convertors, and optics for beam characterization and process control.