Process simulation of micro device with virtual reality technology

Abstract

The process design of micro device is more intuitive and efficient with the fabricating feature technology. To improve manufacturability of the feature-based process model, the process simulating method is presented, which is based on 3D modeling and compatible with virtual reality environment. Firstly, the relationship between the simulating model and the feature modeling is presented. Secondly, the simulating framework is constructed with both surface and bulk micro mechanizing technology. With java3D technology, the feature-based models in both design and process stages are intuitively represented. Moreover, it provides the linkage for the feature model data structure and virtual reality configuration. Finally, the 3D simulating model is combined with the virtual reality environment. © 2013 Springer-Verlag.