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Scanning Electron Microscope Energy Dispersive X-Ray Spectrometry

  • Morita M
Springer Singapore, (2018), 557-561
DOI: 10.1007/978-981-10-6156-1_90
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Abstract

SEM-EDS performs an elemental analysis on a material’s surface. The high-energy electron beam of the scanning electron microscope (SEM) interacts with the sample material and a characteristic X-ray is generated. Energy-dispersive X-ray spectrometer (EDS, EDXS)...

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Morita, M. (2018). Scanning Electron Microscope Energy Dispersive X-Ray Spectrometry. In Compendium of Surface and Interface Analysis (pp. 557–561). Springer Singapore. https://doi.org/10.1007/978-981-10-6156-1_90

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