Deep-ultraviolet microscopy and microspectroscopy

Abstract

Microscopy and microspectroscopy are popular techniques for chemical analysis of a specimen having a micron to submicron distribution of material or material properties, such as living cells, drug agents, microelectronic devices, and nanocarbon materials. Deep-ultraviolet (DUV) light has several advantages compared to visible or infrared (IR) light for microscopy and microspectroscopy. DUV imaging techniques have largely advanced since the 1990s, while DUV microscopy appeared more than 100 years ago. This chapter first looks back at the early days of DUV microscopy and microspectroscopy to see how the research fields have grown and why they have advanced in the recent years. The chapter then describes in detail the recent advances, followed by future perspectives.