Reactive nitrogen sputtering of Fe, Al and Fe(Al)

Abstract

In this work we have systematically studied reactive nitrogen sputtering of Fe, Al and a composite Fe(Al) targets by varying the amount of reactive nitrogen. It was found that reactive nitrogen sputtering of a composite Fe(Al) having about 2% Al is completely different from pure Fe and pure Al. The obtained results can be understood in terms of involved sputtering process. © 2012 American Institute of Physics.