System-level simulation of microsystems

Abstract

Microelectromechanical systems require a multidisciplinary approach to design, including knowledge of fabrication technology, mechanics, electromechanics, and electronics. In the majority of cases, good MEMS design requires the evaluation of tradeoffs among the fabrication process, micromechanical topology, and sizing. Sensor interface circuits, signal conditioning, and feedback provide additional interactions that affect design choices. This chapter provides an introductory overview to the system-level simulation of microsystems in support of the design effort. Discussion is devoted to microelectromechanical structures with electronics. However, the general methods outlined here have equal applicability in other microsystems, such as microfluidic and micro-optical systems. © 2006 Springer-Verlag Berlin Heidelberg.