Nanostructure Thin-Film Removal via a Cylinders Tool for Computer Touch Sensing Material

Abstract

This study describes a precise method for the electro-chemical removal of defective tin-doped indium oxide (ITO) thin film from the surface of polyethylene terephthalate (PET) touch screen material using a newly designed multi-cylinder electrode tool. In the current experiment, a small gap-width between the cylindrical cathodes and anodes and the workpiece reduces the time taken to remove a particular amount of ITO by dissolution. A large diameter cathode rotational circle also reduces the time taken for effective ITO film removal because the dissolution effect is facilitated by the provision of sufficient electrochemical power. High rotational speed of the multi-cylinder tool and a high electrolyte flow rate also corresponds with an increase in the dissolution rate of the defective ITO layer. A small diameter of either the anode or cathode combined with enough electric power also results in faster dissolution. The removal rate of the ITO layer is also improved by a reduction in the number of cylinders used. This tool design was found to be most effective for the electrochemical removal of defective ITO thin film nanostructures and can remove the material easily and cleanly in a very short time. This newly designed tool and ultra-precise reclamation process can be used very effectively in the optoelectronics semiconductor industry for the removal of defective ITO layers from PET touch screen substrate to allow the material to be returned to the production line. This recycling will reduce both production costs and pollution. © Springer-Verlag Berlin Heidelberg 2013.