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Three-Dimensional Nanostructure Fabrication by Focused Ion Beam Chemical Vapor Deposition

  • Matsui S
Springer Berlin Heidelberg, (2010), 211-229
DOI: 10.1007/978-3-642-02525-9_7
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Matsui, S. (2010). Three-Dimensional Nanostructure Fabrication by Focused Ion Beam Chemical Vapor Deposition. In Springer Handbook of Nanotechnology (pp. 211–229). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-642-02525-9_7

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