Abstract
TiO2 layers for gas sensing applications were obtained by Liquid Phase Deposition (LPD). The layers were deposited on gold-coated piezoelectric quartz crystals. The surface structure, morphology and chemical properties were analysed by X-ray diffraction (XRD), Scanning Electron Microscopy (SEM) and X-ray Photoelectron Spectroscopy (XPS). SEM showed that the layers were porous and composed of uniform crystalline grains. XPS indicated them to be non-stoichiometric. © 2008 IOP Publishing Ltd.
Cite
CITATION STYLE
Stefanov, P., Shipochka, M., Stefchev, P., Raicheva, Z., Lazarova, V., & Spassov, L. (2008). XPS characterization of TiO2 layers deposited on quartz plates. Journal of Physics: Conference Series, 100(1). https://doi.org/10.1088/1742-6596/100/1/012039
Register to see more suggestions
Mendeley helps you to discover research relevant for your work.
