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Microdischarge Device Fabricated In Silicon By Micromachining Technique with Pyramidal Cavity

  • Chen J
  • Park S
  • Eden J
  • et al.
Springer Berlin Heidelberg, (2001), 674-677
DOI: 10.1007/978-3-642-59497-7_160
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Abstract

This paper reports a novel silicon micromachined microdischarge device. The device is comprised of a bulk micromachined cathode substrate and a metal anode, separated by a dielectric layer. This device produces light emission from the cavity in a noble gas under a large DC bias. Stable operation has been observed over a wide range of operating pressures. Arrays as large as 10×10 have been observed

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APA

Chen, J., Park, S.-J., Eden, J. G., & Liu, C. (2001). Microdischarge Device Fabricated In Silicon By Micromachining Technique with Pyramidal Cavity. In Transducers ’01 Eurosensors XV (pp. 674–677). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-642-59497-7_160

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