Cathodic Arc Sources

Abstract

The chapter on arc sources and systems is somewhat unusual because it focuses on technology and engineering, rather than on physics. Here, practical designs for DC and pulsed arc sources are presented. Many details are covered such as how to trigger the arc and how to steer the apparent spot motion. From source design we move on and consider the whole system, which is generally either a batch coater or, less often, an in-line coater.