Microelectromechanical sensors

Abstract

Microelectromechanical sensors are miniature sensors made by micro fabrication technique, with typical characterization dimensions between nanometer and millimeter range. Micro sensors have attracted great attention because of their many merits and wide applications. They have experienced several significant stages in the last few decades, along with tremendous progress in fabrication technologies. The main advantages of microsensors are their capability of batch fabrication, low cost, small size, light weight, low power consumption, and ease for integration. In this chapter, the development of physical, chemical and biological microsensors are described, and the principles, fabrication techniques, properties and applications of several microsensors are presented.