Analysis of Piezoresistive Effects in Silicon Structures Using Multidimensional Process and Device Simulation

Lades, M., Frank, J., Funk, J., & Wachutka, G. (1995). Analysis of Piezoresistive Effects in Silicon Structures Using Multidimensional Process and Device Simulation. In Simulation of Semiconductor Devices and Processes (pp. 22–25). Springer Vienna. https://doi.org/10.1007/978-3-7091-6619-2_5