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Automatic mode matching for high-q vibratory rate gyroscopes

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop (2008) 352-355
DOI: 10.31438/trf.hh2008.91
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Abstract

We demonstrate automatic mode-matching for high-Q micromachined vibratory rate gyroscopes. Unlike previously proposed techniques, our approach continuously tunes the sense resonance frequency to match the drive frequency and achieves a stable scale factor and more than 50Hz of bandwidth regardless of fabrication and drift.

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CITATION STYLE

APA

Ezekwe, C. D., & Boser, B. E. (2008). Automatic mode matching for high-q vibratory rate gyroscopes. In Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 352–355). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2008.91

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