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Study of Finishing of Wafers by Magnetic Field-Assisted Finishing

  • YAMAGUCHI H
  • YUMOTO K
  • SHINMURA T
  • et al.
Journal of Advanced Mechanical Design, Systems, and Manufacturing (2009) 3(1) 35-46
DOI: 10.1299/jamdsm.3.35
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Abstract

1, 2009 35 Study of of Wafers by Field- Assisted * YAMAGUCHI**, Kazuki YUMOTO***, Takeo SHINMURA**** and Takahiko OKAZAKI

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APA

YAMAGUCHI, H., YUMOTO, K., SHINMURA, T., & OKAZAKI, T. (2009). Study of Finishing of Wafers by Magnetic Field-Assisted Finishing. Journal of Advanced Mechanical Design, Systems, and Manufacturing, 3(1), 35–46. https://doi.org/10.1299/jamdsm.3.35

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