Measurement and simulation of the dissolved oxygen concentration and the ph value at the o2-FET

Abstract

Application fields of microsensors are shown and the potential of the O2-FET in this field is described. The principle of measurement of pH with the O2-FET is described and an extension towards a parallel measurement of dissolved oxygen via amperometric and potentiometric methods is presented. Furthermore a finite elements model which describes the transactions at the O2-FET is introduced. Results of real measurements and of the simulation are presented and discussed.