Transparent conducting zinc oxide thin film prepared by off-axis rf magnetron sputtering

Abstract

Highly conducting and transparent ZnO : Al thin films were grown by off-axis rf magnetron sputtering on amorphous silica substrates without any post-deposition annealing. The electrical and optical properties of the films deposited at various substrate temperatures and target to substrate distances were investigated in detail. Optimized ZnO : Al films have conductivity of 2200 S cm-1 and average transmission in the visible range is higher than 85%. The conductivity and mobility show very little temperature dependence.