Photopatterning of titanium oxide gel films prepared from titanium alkoxide modified with hydroxyl-substituted aromatic ketones

Abstract

TiO2 gel films were prepared from titanium tetra-n-butoxide modified with 1-(2-uydroxyphenyl)-3-phenyl-2-propen-1-one in l-butanol by the sol-gel method. The obtained gel film showed an absorption band, characteristic of the chelate ring, at 425 nm. The absorption band was shifted to the longest wavelength region in the photosensitive gel films which we have examined. The band gradually decreased in intensity by UV-irradiation using a high pressure mercury lamp. This indicates that the gel film is photosensitive. Using the photosensitivity, fine patterns (about 3μm) could be fabricated by the UV-irradiation through a mask and leaching.